testing the Z scanner :
* Z scanner 可承受最大偏壓為60V
new scanner 電容值:
X - 0.68 mf
Y - 0.71 mf
Z - 2.89 mf
* Training - Mai
* AFM contact mode
parameter:
Scan Range X: 3.5e+04 nm
Scan Range Y: 3.5e+04 nm
Scan Rotation: 90 deg
Scan Speed: 4083 nm/s
Feedback Loop: on
Actual Value Select: ADC1
Regulator P: 0.002
Regulator I: 2 Hz
Regulator Setpoint: 2.8
Slope Compensation: on
Slope Compensation X: 5 %
Slope Compensation Y: -3 %
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